Tungsten AlN Heater Description
Tungsten AlN Heater combines the high-temperature capabilities of tungsten with the excellent thermal conductivity and electrical insulation properties of aluminum nitride. This combination makes these heaters ideal for high-temperature and high-precision applications in semiconductor manufacturing, advanced materials research, industrial heating, electronics, and scientific equipment. Their ability to withstand extreme temperatures, provide uniform heating, and resist chemical and mechanical degradation makes them invaluable in cutting-edge technological and industrial processes.
Tungsten AlN Heater Specification
Heating Material
|
Tungsten
|
Coating
|
AlN
|
Linear Coefficient of Expansion
|
4.3 x 10-6
|
Thermal Conductivity (W/mK)
|
170-180
|
Size
|
Customized
|
Heating speed
|
≤300 ℃/s
|
Tungsten AlN Heater Application
1. Semiconductor Manufacturing:
- CVD and PVD Processes: Used in chemical vapor deposition (CVD) and physical vapor deposition (PVD) systems for the production of thin films and coatings.
- Epitaxy: Employed in epitaxial growth processes for semiconductor wafers, where precise temperature control is critical.
2. Advanced Materials Research:
- High-Temperature Experiments: Used in laboratory settings for experiments requiring controlled high-temperature environments.
- Synthesis of Advanced Materials: Ideal for synthesizing materials that require high temperatures and precise thermal management.
3. Industrial Heating Applications:
- Furnaces and Kilns: Used in high-temperature furnaces and kilns for materials processing and heat treatment applications.
- Heat Treatment: Employed in processes such as annealing, sintering, and brazing.
4. Electronics and Optoelectronics:
- LED Manufacturing: Used in the production of light-emitting diodes (LEDs) where high temperatures and precise control are needed.
- Laser Diodes: Employed in the fabrication of laser diodes and other optoelectronic devices.
5. Medical and Scientific Equipment:
- Analytical Instruments: Used in high-temperature components of analytical instruments, such as mass spectrometers and electron microscopes.
Tungsten AlN Heater Packaging
Our Tungsten AlN Heater is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
Tungsten AlN Heater FAQs
Q1: How are Tungsten AlN heaters manufactured?
Deposition: Tungsten is deposited onto an AlN substrate through processes like chemical vapor deposition (CVD) or physical vapor deposition (PVD).
Bonding: The tungsten layer is bonded to the AlN substrate, creating a durable and efficient heating element.
Q2: Why are Tungsten AlN heaters used in semiconductor manufacturing?
These heaters provide precise and uniform heating, essential for processes like wafer processing and thin film deposition. Their high thermal conductivity and electrical insulation ensure efficient and reliable performance in semiconductor manufacturing.
Q3: Can Tungsten AlN heaters be customized for specific applications?
Yes, Tungsten AlN heaters can be manufactured in various shapes, sizes, and power ratings to meet specific application requirements, ensuring optimal performance.