Aluminum Nitride Heater Description
Aluminum Nitride Heater is a type of heating element made from aluminum nitride, a material known for its exceptional thermal conductivity, electrical insulation properties, and high temperature stability. AlN has a thermal conductivity of about 140-180 W/mK, which is much higher than many other ceramic materials. This allows for efficient heat transfer and uniform temperature distribution. AlN is an excellent electrical insulator, with a high dielectric strength, making it ideal for applications where electrical isolation is important. These heaters are used in a variety of applications that require precise temperature control and efficient heat transfer.
Aluminum Nitride Heater Specification
Heating Material
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AlN
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Thickness
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0.8-3.0 mm
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Size
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Customized
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Max. Working Temp.
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1000℃
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Density
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3.26 g/cm3
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Heating speed
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≤120 ℃/s
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Maximum Watt Density
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155 W/cm2
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Thermal Conductivity
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220 W/mK
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Aluminum Nitride Heater Application
1. Semiconductor Manufacturing:
- Wafer Processing: Used in semiconductor wafer processing equipment for applications such as epitaxy, chemical vapor deposition (CVD), and physical vapor deposition (PVD).
- Test Equipment: Employed in test and measurement equipment for semiconductor devices.
2. Medical and Laboratory Equipment:
- DNA Amplification: Used in PCR (Polymerase Chain Reaction) devices for DNA amplification, where precise temperature control is critical.
- Analytical Instruments: Integrated into analytical instruments that require high-temperature operation, such as mass spectrometers and chromatography equipment.
3. Aerospace and Defense:
- Thermal Management: Used in thermal management systems for avionics and other high-performance electronic systems.
4. Industrial Heating:
- Plastic Welding: Used in plastic welding equipment where high temperatures are needed for precise welding operations.
- Heating Plates and Hot Plates: Employed in heating plates and hot plates for various industrial processes.
5. Optoelectronics:
- LED Manufacturing: Used in the manufacturing of LEDs where high temperatures and precise thermal control are required.
- Laser Diodes: Integrated into laser diode assemblies for efficient thermal management.
Aluminum Nitride Heater Packaging
Our Aluminum Nitride Heater is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
Aluminum Nitride Heater FAQs
Q1: How are AlN heaters manufactured?
Sintering: AlN powder is pressed into the desired shape and then sintered at high temperatures to form a solid, dense ceramic heater.
Thin Film and Thick Film Technologies: Resistive heating elements are deposited onto AlN substrates using thin film or thick film technologies, creating precise heating patterns.
Q2: Why are AlN heaters used in semiconductor manufacturing?
AlN heaters provide precise and uniform heating, which is essential for semiconductor manufacturing processes like wafer processing and thin film deposition. Their high thermal conductivity and electrical insulation ensure efficient and reliable performance.
Q3: Can AlN heaters be customized for specific applications?
Yes, AlN heaters can be manufactured in various shapes, sizes, and power ratings to meet specific application requirements, ensuring optimal performance.