PBN0956 PBN Coated Graphite Products

Catalog No. PBN0956
Size <40cm (15")
Material PBN, Pyrolytic Boron Nitride
Purity 99.99% for PBN coating
Surface Zero porosity
Coating thickness 50~500μm

Stanford Advanced Materials provide the full range of CVD material, such as PBN coated and silicon carbide coated products. As PBN and graphite are machinable materials, we could offer custom manufacturing service and deliver all kinds of products for semiconductor industries and applications require high temperature and high purity.

PBN Coated Graphite Products Description

As PBN and graphite are machinable materials, we could offer custom manufacturing services and deliver all kinds of products based on graphite with PBN coating. These including trays, furnace components, heating elements, vaporizing pots, rods, bars, sheets, tubes, and more. Our experienced experts are pleased to help to locate the best solutions for your developing process.  

 Compared with normal boron nitride ceramic, pyrolytic boron nitride (PBN) has raw materials with a much higher purity level. PBN sheets, discs, and other pyrolytic boron nitride products are synthesized on the mold by chemical vapor deposition (CVD) process, with BCl3 and NH3.

   BCl3 + NH3 ----> BN +3HCl

Pyrolytic boron nitride advanced ceramics exhibits high resistance to electric but good thermal conductivity. It is a high purity material with no porosity which could be deposit on all kinds of graphite shapes by chemical vapor deposition (CVD). Although Pyrolytic boron nitride could be deposited on various materials, it is usually used on graphite only, since the temperature of this CVD process is extremely high and the atmosphere is corrosive. PBN coated graphite materials significantly enhanced the performance of the surface. Better purity, lower porosity, and roughness. PBN material could also stand high temperatures (2500`C). As the coated products have great performance in high vacuum and high-temperature circumstances, they are ideal for applications in the semiconductor industry.

PBN Coated Graphite Products Material Properties

Structure of pyrolytic boron nitride and graphite

Item

value

Unit

lattice constant

a:2.504×10-10     c:6.692×10-10

μ m

density

2.0-2.19

g/cm3

resistivity

3.11×1011

Ω·cm

tensile strength(ab)

153.86

N/mm2

bend strength

c

243.63

N/mm2

ab

197.76

N/mm2

elastic modulus

 

235690

N/mm2

Thermo conductivity

 

“a” direction    “c” direction

 

(200℃)

60                  2.60

W/m·k

(900℃)

43.70             2.80

W/m·k

dielectric strength(at room temperature)

56

KV/mm

 

 

Stanford Advanced Materials also provide pyrolytic graphite(PG) products. Click here or send an inquiry for more information.

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