PECVD Graphite Boat Description
PECVD Graphite Boat is one of the carriers of normal silicon wafers in the production of the coating process. It has many boat wafers with a certain interval in the structure, and there is a very narrow space between two adjacent boat wafers, and silicon wafers are placed on both sides of the empty door. As graphite features good conductivity and thermal conductivity, an AC voltage is applied between two adjacent boats to form positive and negative electrodes. When there is a certain air pressure and gas in the chamber, a glow discharge occurs between the two boats. The glow discharge can decompose SiH4 and NH3 gas in the space, form Si and N ions, and combine to form SiNx molecules It is deposited on the surface of silicon wafer to achieve the purpose of coating.
PECVD (Plasma Enhanced Chemical Vapor Deposition) graphite boat is a specialized container or carrier made of graphite used in the PECVD process for depositing thin films on various substrates. In the context of semiconductor manufacturing and other industries where thin film deposition is critical, these graphite boats hold and transport the substrates (like silicon wafers) through the PECVD chamber where the deposition process occurs.
PECVD Graphite Boat Specifications
|
Material
|
-
|
PECVD Graphite
|
|
Density
|
g/cm³
|
1.87
|
|
Specific Resistance
|
μΩm
|
13
|
|
Flexural Strength
|
MPa
|
72
|
|
Ash Content
|
PPM
|
4.7
|
|
CTE
|
1E-6/℃
|
4.7
|
|
Piece Tolerance
|
mm
|
±0.01
|
|
Thermal Expansion
|
mm
|
≤0.2
|
|
Grain Size
|
μm
|
7
|
|
Shore Hardness
|
HSD
|
70
|
PECVD Graphite Boat Applications
- Semiconductor Manufacturing: Graphite boats are extensively used in semiconductor fabrication for the deposition of various types of thin films, including dielectrics, conductors, and semiconductors.
- Solar Panels: In the production of photovoltaic cells, PECVD graphite boats are used for depositing anti-reflective coatings and other layers that improve the efficiency of solar cells.
- Optoelectronics: For components that require precise optical properties, PECVD is used to deposit layers with specific refractive indices, and graphite boats carry the substrates through this process.
PECVD Graphite Boat Packaging
Our PECVD Graphite Boat is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
