1100C Vertical Vacuum Furnace with Flange VBF-1200X-V9 Description
1100C Vertical Vacuum Furnace with Flange is a vertical vacuum-sealed furnace featuring a quartz tube chamber measuring Ø200×Ø190×H425 mm, complete with stainless steel flanges and valves. This furnace is equipped with a Torr turbopump, enabling it to achieve a vacuum level of 10^-5 Torr. Designed for the calcination or annealing of semiconductor wafers (up to 8 inches in diameter), it operates under vacuum or various gas atmospheres, reaching temperatures of up to 1100°C.
1100C Vertical Vacuum Furnace with Flange VBF-1200X-V9 Specifications
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Features
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- High-purity alumina fiber insulation surrounding the chamber
- Large pipe diameter, high vacuum degree
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Basic Parameters
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- Max. heating temperature: 1100℃ (< 1hr)
- Continuously heating temperature: 1000°C
- Recommended Heating rate: 10°C /min
- Heating element: Ni-Cr-Al Resistance Wire
- Thermocouple: Type K
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Power
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220V AC, 3.5 KW, 50/60Hz
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Quartz Tube & Effective Heating
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- Tube size: Ø200×Ø190×H425 mm
- Max. loading: 40Kg
- Heating area: Ø240×H245 mm
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Vacuum Flange
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- Stainless steel vacuum flange with dual high-temperature silicone O-rings with water cooling jacket
- Mechanical Vacuum Gauge (included as standard accessory), which ranges from 10-2 torr
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Temperature Control
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- NRTL certified digital temperature controller is included
- Proportional–integral–derivative control (PID control) and auto-tune function
- 50 segments programmed with ramping, cooling, and dwelling steps
- Built-in over-temperature alarm and thermocouple failure alarm
- +/- 1 ºC temperature control accuracy
- THE Default DB9 PC communication port included for connecting to PC
- Eurotherm Temperature Controller is available at the extra cost with +/-0.1°C accuracy
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Overall Dimension
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500mm L * 530mm W * 880 mm H
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Net Weight
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70 kg
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Warranty
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- One year limited warranty with lifetime support.
- ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of SAM One Year Limited Warranty.
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Certificate
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- CE Certified
- NRTL or CSA certification is available at extra cost.
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1100C Vertical Vacuum Furnace with Flange VBF-1200X-V9 Applications
- Materials Science and Engineering: Used for the synthesis, annealing, and heat treatment of advanced materials such as ceramics, metals, and composites. It enables precise control over the microstructure and properties of materials for research and development purposes.
- Semiconductor Processing: Employed for the fabrication and processing of semiconductor devices, including annealing, oxidation, diffusion, and deposition processes. It ensures the purity and integrity of semiconductor materials by operating in a clean, high vacuum environment.
- Electronics Manufacturing: Utilized for the production of electronic components and devices, including annealing of semiconductor wafers, fabrication of thin film transistors, and packaging processes.
- Solar Cell Fabrication: Employed in the production of solar cells and photovoltaic devices, including annealing and doping processes to optimize the performance and efficiency of solar cell materials.
1100C Vertical Vacuum Furnace with Flange VBF-1200X-V9 Packaging
Our 1100C Vertical Vacuum Furnace with Flange VBF-1200X-V9 is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
