Channel Gas Control System RTP-1000-LCD Description
Channel Gas Control System is a multi-channel mass flow meter control system. Its mass flow meter and stainless steel gas mixing tank are installed in a mobile cabinet. The mobile cabinet can bear a maximum load of 1000 lbs, so it can be used with most tube furnaces. The tube furnace can be placed on a mobile cabinet to save space. The flow setting and status display of each channel gas circuit are concentrated on a 6" touch screen, and the gas flow curve and data can be viewed in real-time. This equipment is widely used in CVD experiments in the materials industry and annealing experiments of various materials.
Channel Gas Control System RTP-1000-LCD Specifications
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Features
|
- Rapid temperature rise, up to 50℃/s
- Equipped with a multi-channel proton flow meter control system, which can view gas flow curves and data in real time
- Super large pipe diameter φ110mm
- The highest temperature reaches 900℃
|
|
Working Temperature
|
- Max. heating temperature: 900℃ (≤10min); 800℃(<30min); 600℃(Continuous)
- Heating rate: ≤50℃ (<800℃); 10℃/s (800-900℃)
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|
Working Voltage
|
AC 220V Single phase 50/60Hz
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|
Power
|
12KW
|
|
PLC Touch Screen
|
- 6" color touch screen control panel to make parameter setting at easy.
- Touchscreen Control and PC remote switchable, RS485 Port and a supplied software are included for remote operation by PC, not compatible with LabVIEW for now.
|
|
Mechanical Pressure Gauge
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- Measurement Range:-0.1~0.15 MPa (0.01 MPa/grid)
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|
Needle Valve
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|
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Gas Pipeline
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- One stainless steel gas mixing tank is built-in
- Internal pipeline: 1/4" O.D stainless steel
- External pipeline: 1/4" O.D PTFE
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|
Gas Mixing Tank
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|
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Temperature Control
|
- PID automatic control via solid-state relay with 50 steps programmable
- Built-in Over Temperature and Thermocouple Failure Protection
- +/-1°C accuracy
- K-type thermal couple
|
|
Warranty
|
- One year limited warranty with lifetime support.
- ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of SAM One Year Limited Warranty.
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|
Equipment Dimensions
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600mm L*855mm W* 700mm H
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|
Certificate
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- CE Certified
- NRTL or CSA certification is available at extra cost.
|
Channel Gas Control System Specifications
|
Function
|
Two Channels
|
Three Channels
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Four Channels
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Customized 5-9 Channels
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|
Working Temperature
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5~45℃
|
|
Max. Pressure
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3*106 Pa
|
|
Accuracy
|
±1.5% FS
|
|
Repeat accuracy
|
±0.2% FS
|
|
Controlling Range
|
Controller 1: 1~199 SCCM
Controller 2: 1~499 SCCM
|
Controller 1: 0~100 SCCM
Controller 2: 1~199 SCCM
Controller 3: 1~499 SCCM
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Controller 1: 0~100 SCCM
Controller 2: 1~199 SCCM
Controller 3: 1~199 SCCM
Controller 4: 1~499 SCCM
|
Controller 1: 0~100 SCCM
Controller 2: 1~199 SCCM
Controller 3: 1~199 SCCM
Controller 4: 1~499 SCCM
|
Other flow ranges can be customized: 0~100, 1~200, 1~500, 1~1000, 1~5000 SCCM.
Channel Gas Control System RTP-1000-LCD Applications
Channel Gas Control System RTP-1000-LCD is suitable for use with CVD furnaces to study the gas environmental influence on various materials.
Channel Gas Control System RTP-1000-LCD Packaging
Our Channel Gas Control System RTP-1000-LCD is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
Specification
|
Features
|
- Rapid temperature rise, up to 50℃/s
- Equipped with a multi-channel proton flow meter control system, which can view gas flow curves and data in real time
- Super large pipe diameter φ110mm
- The highest temperature reaches 900℃
|
|
Working Temperature
|
- Max. heating temperature: 900℃ (≤10min); 800℃(<30min); 600℃(Continuous)
- Heating rate: ≤50℃ (<800℃); 10℃/s (800-900℃)
|
|
Working Voltage
|
AC 220V Single phase 50/60Hz
|
|
Power
|
12KW
|
|
PLC Touch Screen
|
- 6" color touch screen control panel to make parameter setting at easy.
- Touchscreen Control and PC remote switchable, RS485 Port and a supplied software are included for remote operation by PC, not compatible with LabVIEW for now.
|
|
Mechanical Pressure Gauge
|
- Measurement Range:-0.1~0.15 MPa (0.01 MPa/grid)
|
|
Needle Valve
|
|
|
Gas Pipeline
|
- One stainless steel gas mixing tank is built-in
- Internal pipeline: 1/4" O.D stainless steel
- External pipeline: 1/4" O.D PTFE
|
|
Gas Mixing Tank
|
|
|
Temperature Control
|
- PID automatic control via solid-state relay with 50 steps programmable
- Built-in Over Temperature and Thermocouple Failure Protection
- +/-1°C accuracy
- K-type thermal couple
|
|
Warranty
|
- One year limited warranty with lifetime support.
- ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of SAM One Year Limited Warranty.
|
|
Equipment Dimensions
|
600mm L*855mm W* 700mm H
|
|
Certificate
|
- CE Certified
- NRTL or CSA certification is available at extra cost.
|
Channel Gas Control System Specifications
|
Function
|
Two Channels
|
Three Channels
|
Four Channels
|
Customized 5-9 Channels
|
|
Working Temperature
|
5~45℃
|
|
Max. Pressure
|
3*106 Pa
|
|
Accuracy
|
±1.5% FS
|
|
Repeat accuracy
|
±0.2% FS
|
|
Controlling Range
|
Controller 1: 1~199 SCCM
Controller 2: 1~499 SCCM
|
Controller 1: 0~100 SCCM
Controller 2: 1~199 SCCM
Controller 3: 1~499 SCCM
|
Controller 1: 0~100 SCCM
Controller 2: 1~199 SCCM
Controller 3: 1~199 SCCM
Controller 4: 1~499 SCCM
|
Controller 1: 0~100 SCCM
Controller 2: 1~199 SCCM
Controller 3: 1~199 SCCM
Controller 4: 1~499 SCCM
|
Other flow ranges can be customized: 0~100, 1~200, 1~500, 1~1000, 1~5000 SCCM.
