800C CSS and RTP Furnace RTP-II-5-R Description
800C CSS and RTP Furnace RTP-II-5-R is a sophisticated rapid thermal processing (RTP) furnace tailored for Close Spaced Sublimation (CSS) film coating. It accommodates circular or square wafer samples up to 5 inches in size and can reach a maximum working temperature of 800°C. The furnace features dual halogen heater groups—located above and below the sample—which can independently heat at rates up to 10°C per second. Additionally, the top sample holder is rotatable, ensuring even coating across the substrate.
800C CSS and RTP Furnace RTP-II-5-R Specifications
|
Features
|
- A 20-inch ID vacuum chamber constructed from stainless steel, which achieves a vacuum level down to 10^-5 torr using a turbopump.
- Two 12-inch infrared (IR) heating plates strategically positioned within the chamber to optimize heat distribution.
- A Eurotherm precision temperature controller that ensures temperature accuracy to within ±0.1°C.
- A touchscreen computer that allows for comprehensive control over all processing parameters.
|
|
Basic Parameters
|
- Max. Heating Temp.: 950℃
- MaxTemperature difference between the two heaters: ≤ 300℃
- Max Heating rate: 8℃/s
- Max. Cooling Rate: <20℃/s
|
|
Power
|
208 - 240VAC, three phases, 50/60 Hz
60kw
|
|
Vacuum Chamber
|
- Chamber dimension: ID 500mm x H 460mm
- Two 60mm dia quartz windows are built for easy observation.
- One air-tight sliding baffle is built-in for blocking the evaporation source under high vacuum
- A precision anti-corrosion digital vacuum gauge comes standard with the unit, ensuring accurate vacuum measurements.
- Optional Vacuum Pump: 10-5 torr by turbopump or 10-2 torr by a mechanical pump
|
|
Heater and Sample Holder
|
- Two IR heaters are located on top and bottom of the chamber with adjustable gaps from 2 - 25 mm.
- Heaters are made of stainless steel with a water cold jacket to keep heat insulation.
- 12 " Dia. the circular wafer holder is built into the top heater for holding the substrate.
- The graphite plates are placed on the top of the IR heater to make heating more uniform.
- The top sample holder is rotatable at an adjustable speed from 1 - 10 RPM
- A 58L/min circulating water chiller is included for cooling heaters
|
|
Control System
|
- Two Eurotherm 3000 digital temperature controllers with 24 segments programmable offer independent controlling of top and bottom heaters with +/- 0.1ºC accuracy
- All operations, such as temperature profiles, vacuum pressure, rotation speed, rotation speed and lifting of the flange are controlled by a touch screen computer via a PLC.
- The computer can show the temperature and vacuum profiles and star 10 pre-set programs of processing
|
|
Net Weight
|
~500 kg
|
|
Dimension
|
L 1450 X W 1250 X H 2100 mm
|
|
Warranty
|
- One year limited warranty with lifetime support.
- ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of SAM One Year Limited Warranty.
|
|
Certificate
|
- CE Certified
- NRTL or CSA certification is available at extra cost.
|
800C CSS and RTP Furnace RTP-II-5-R Applications
800C CSS and RTP Furnace RTP-II-5-R is ideal for researching and developing next-generation thin films for solar cells, including materials such as Cadmium Telluride (CdTe), Sulfide, and Perovskite. Its design and capabilities make it an essential tool for advancing solar cell technology.
800C CSS and RTP Furnace RTP-II-5-R Packaging
Our 800C CSS and RTP Furnace RTP-II-5-R is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
