1200C Microwave Plasma Assisted CVD (MPCVD) 2” Tube Furnace GSL-1200X-50-MWPE Description
1200C Microwave Plasma Assisted CVD (MPCVD) 2” Tube Furnace GSL-1200X-50-MWPE is a microwave-assisted Chemical Vapor Deposition (MPCVD) tube furnace that combines a 2.45GHz microwave generator with heating modules and a 2-inch OD quartz tube. This setup provides a vacuum-sealed, flanged assembly that ensures stable plasma generation from 800°C to 1200°C under approximately 4.5 torr vacuum. The furnace features a 1400W, 2.45 GHz microwave chamber.
Designed with safety in mind, it includes stainless steel and aluminum shielding to protect against microwave radiation. The rapid heating capability of up to 20°C per minute and a maximum working temperature of 1200°C in the heating module within the microwave chamber ensure efficient processing. It also offers precise temperature control, with a 30-segment programmable controller that maintains accuracy within ±1℃.
1200C Microwave Plasma Assisted CVD (MPCVD) 2” Tube Furnace GSL-1200X-50-MWPE Specifications
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Features
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- 1400W 2.45 GHz microwave chamber
- Stainless steel and aluminum shield to protect from microwave radiation
- Heating module inside microwave chamber
- Precision temperature control with 30 segments programable within +/- 1ºC
- Vacuum casting thermal insulation material for max. energy saving.
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Microwave
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- Frequency: 2.45 GHz ±25 MHz
- Power Output: 1400W
- Microwave leaking: ≤ 3 mW/cm² at 1 meter away.
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Heating Module and Processing Tube
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- Ni-Cr-Al wire heating coin with 80 mm ID is installed inside fibrous alumina module.
- The heating coil is placed inside the microwave chamber
- 2" quartz tube (OD 50 x ID 44x L 600 mm) is inserted inside the heating module and microwave chamber to produce plasma.
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Power
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2000W, 208-240VAC, Single Phase, 50/60Hz
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Flanges & Vacuum
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- One pair of vacuum flange is included to seal the quartz tube
- KF25 vacuum port and 1/4 gas inlet and outlet with needle valves are built-in the flange
- One digital vacuum gauge is included for vacuum control
- Max. Vacuum level: 10-2 torr by dry pump and 10-5 torr by turbopump.
- The pump is not included.
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Working Temp.
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- Max. Temp.: 1200℃ (<30min); ≤1100℃ continuous.
- Min. Temp: 800℃
- Heating rate: 1 ~20°C/min
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Temperature Controller
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- 30 segments programmable for heating rate, dwell temperature and time, and cooling rate
- SCR temperature control
- Over-temperature and thermal couple broken protection
- Control accuracy +/-1.0℃
- K-type thermal couple inserted through the flange
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Net Weight
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30kg
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Dimension
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Microwave: 560(L) x 410(W) x 340(H) mm
Total depth with tube and flange: 780 mm
Controller: 600(L) x 520(W) x 265(H) mm
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Warranty
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- One-year limited warranty with lifetime support.
- Consumables, including crucibles, heating elements, and heat insulation materials are not covered by the warranty.
- ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of SAM One Year Limited Warranty.
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Certificate
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- CE Certified
- NRTL or CSA certification is available at extra cost.
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1200C Microwave Plasma Assisted CVD (MPCVD) 2” Tube Furnace GSL-1200X-50-MWPE Applications
- Synthesis and Processing of Materials: These furnaces are excellent for synthesizing complex materials like ceramics, glasses, and composites.
- Sintering of Ceramics and Metals: The quick, high-temperature capabilities of microwave furnaces make them ideal for the sintering of ceramic and metallic powders.
- Research and Development: Microwave tube furnaces are extensively used in academic and industrial research laboratories for the development of new materials and the study of heat treatment processes under controlled conditions.
1200C Microwave Plasma Assisted CVD (MPCVD) 2” Tube Furnace GSL-1200X-50-MWPE Packaging
Our 1200C Microwave Plasma Assisted CVD (MPCVD) 2” Tube Furnace GSL-1200X-50-MWPE is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
