1200C Microwave Plasma Assisted CVD Rotary Furnace GSL-1200R-MWPE Description
1200C Microwave Plasma Assisted CVD Rotary Furnace GSL-1200R-MWPE is a microwave-assisted Chemical Vapor Deposition (MPCVD) rotary furnace, featuring a 2.45GHz microwave generator paired with a 2-inch rotary processing tube that operates at 0-5 rpm. This combination is vacuum-sealed with flanges, ensuring stable plasma generation from 800°C to 1200°C under approximately 4.5 torr vacuum.
Designed specifically for rapid calcination and the formation of core-shell structures in powder materials, this furnace is particularly suited for advanced battery research applications. Its rotary mechanism facilitates uniform treatment and enhanced reaction efficiency, making it an essential tool for developing next-generation battery materials.
1200C Microwave Plasma Assisted CVD Rotary Furnace GSL-1200R-MWPE Specifications
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Microwave
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- Frequency: 2.45 GHz ±25 MHz
- Power Output: 1400W
- Microwave leaking: ≤ 3 mW/cm² at 1 meter away.
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Heating Module and Processing Tube
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- Ni-Cr-Al wire heating coin with 80 mm ID is installed inside fibrous alumina module.
- The heating coil is placed inside the microwave chamber
- 2" quartz tube (OD 50 x ID 44x L 600 mm) is inserted inside the heating module and microwave chamber to produce plasma.
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Power
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2000W, 208-240VAC, Single Phase, 50/60Hz
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Flanges & Vacuum
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- One pair of vacuum flange is included to seal the quartz tube
- KF25 vacuum port and 1/4 gas inlet and outlet with needle valves are built-in the flange
- One digital vacuum gauge is included for vacuum control
- Max. Vacuum level: 10-2 torr by dry pump and 10-5 torr by turbopump.
- The pump is not included.
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Inline Swivel & Rotary Speed
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- Two Inline Swivel Gas Fittings are included and connected to flanges, which allows gas pipe in place when the tube rotating
- Rotation speed: Tube rotation is driven by a DC motor with a speed range of 1- 5 rpm variable
- A 1/4" gas tube is required to connect the Inline Swivel Gas Fittings to the gas tank
- Click the picture left to see detailed specs
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Working Temp.
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- Max. Temp.: 1200℃ (<30min); ≤1100℃ continuous.
- Min. Temp: 800℃
- Heating rate: 1 ~20°C/min
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Temperature Controller
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- 30 segments programmable for heating rate, dwell temperature and time, and cooling rate
- SCR temperature control
- Over-temperature and thermal couple broken protection
- Control accuracy +/-1.0℃
- K-type thermal couple inserted through the flange
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Net Weight
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30kg
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Dimension
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Microwave: 560(L) x 410(W) x 340(H) mm
Total depth with tube and flange: 780 mm
Controller: 600(L) x 520(W) x 265(H) mm
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Warranty
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- One-year limited warranty with lifetime support.
- Consumables, including crucibles, heating elements, and heat insulation materials are not covered by the warranty.
- ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of SAM One Year Limited Warranty.
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Certificate
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- CE Certified
- NRTL or CSA certification is available at extra cost.
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1200C Microwave Plasma Assisted CVD Rotary Furnace GSL-1200R-MWPE Applications
- Material Synthesis: It can be used for synthesizing advanced materials, such as graphene, carbon nanotubes, and other nanomaterials, which are crucial in electronics, optics, and material science research.
- Surface Modification: The furnace can alter the surface properties of materials to enhance characteristics like hardness, chemical resistance, and biocompatibility. This is particularly valuable in biomedical and aerospace applications.
- Diamond Film Production: Microwave plasma is effective in depositing diamond-like carbon coatings, which are used in tools, wear-resistant coatings, and in some biomedical implants due to their hardness and inert properties.
1200C Microwave Plasma Assisted CVD Rotary Furnace GSL-1200R-MWPE Packaging
Our 1200C Microwave Plasma Assisted CVD Rotary Furnace GSL-1200R-MWPE is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
