1200C 3 Zone Furnace with Sliding Flange, Gas Mixer & Vacuum Pump OTF-1200X-5-III-SF Description
1200C 3 Zone Furnace with Sliding Flange, Gas Mixer & Vacuum Pump OTF-1200X-5-III-SF is a splittable 5" (O.D) three-zone tube furnace capable of rapid heating up to 1200°C. By adjusting the temperature in its three zones, it can create a thermal gradient. This furnace comes with all necessary accessories for immediate use and is ideal for annealing, diffusing, and sintering samples in various atmospheres. Additionally, it features an anti-corrosive Pirani Capacitance Diaphragm Gauge, enabling precise vacuum measurements even with aggressive gases.
1200C 3 Zone Furnace with Sliding Flange, Gas Mixer & Vacuum Pump OTF-1200X-5-III-SF Specifications
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Furnace Structure
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- The double-layer steel casing with two cooling fans, ensures a low surface temperature.
- The energy-efficient, high-purity fibrous alumina insulation provides superior thermal management.
- One flange is mounted on a sliding rail for easy sample loading and unloading, while the other seal flange features a digital vacuum gauge for precise measurement.
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Power
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7KW, 208-240VAC, Single Phase, 50/60Hz
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Working Temp.
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- Max. Temp: 1200℃ (1 hr); 1100℃ (continuous)
- Heating Rate: ≤20℃/min
- Temp. accuracy: ±1.0℃
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Heating Zone Length
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- Three zones: (900mm, 36" in total)
Zone 1: 229mm (9")
Zone 2: 457mm (18.0")
Zone 3: 229 mm (9")
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Constant Temperature Zone
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- If three zones are set at the same temperature, the constant temperature zone is 25" (625 mm) long with a temperature discrepancy of ± 1°C
- If using only one zone (center zone), the constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of ± 1°C
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Heating Elements
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Fe-Cr-Al Alloy doped by Mo
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Temp. Controller
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- Three precision temperature controllers to control three zones separately
- PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time
- Built-in overheating & broken thermocouple protection
- Over-temperature protection and alarm allows for operation without attendant(s)
- ± 1℃ temperature accuracy
- RS485 Communications Port
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Vacuum Sensor & Display
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- Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gasses
- Gauge is installed on the vacuum flange of the tube furnace and provides a wide measure range (10^-5 ~ 1000 torr)
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Tube Size and Flang
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- 130 mm O.D x 120 mm ID. x 1400 mm fused quartz tube included
- Vacuum flanges with both valves and pressure gauge are included
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Sliding Rail
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800mm long sliding rail is installed with one end flange to make loading & unload samples easy
- 2" Quartz boat sitting on the slide rail holder is ready used for diffusion, oxidation, and anneal
- 5" Quartz tube can accommodate 4" quartz wafer boat without holder
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Weight
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~70 kg
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Dimension
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1080 X 430 x 600mm
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Warranty
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One-year limited manufacturer's warranty.
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Warning & Notes
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- To obtain an accurate temperature inside the tube furnace, you need to calibrate the temperature by yourself. Please contact us for more information.
- Warning: Tube furnaces with quartz tube are designed for use with vacuum and low pressure < 0.2 bar / 3 psi
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
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Certificate
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- CE Certified
- NRTL or CSA certification is available at extra cost.
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1200C 3 Zone Furnace with Sliding Flange, Gas Mixer & Vacuum Pump OTF-1200X-5-III-SF Applications
- Annealing: Ideal for relieving internal stresses in materials, improving ductility, and refining grain structure.
- Diffusion: Suitable for processes that require the movement of atoms or molecules within solids, such as in semiconductor fabrication.
- Sintering: Perfect for compacting and forming solid masses of material by heat without liquefying them, commonly used in ceramics and powder metallurgy.
- Various Atmospheres: Designed to operate in different gas environments, including inert, reducing, and oxidizing atmospheres, making it suitable for a wide range of materials and processes.
- Vacuum Measurements with Aggressive Gasses: Equipped with an anti-corrosive Pirani Capacitance Diaphragm Gauge for precise vacuum measurements even in the presence of aggressive gasses.
1200C 3 Zone Furnace with Sliding Flange, Gas Mixer & Vacuum Pump OTF-1200X-5-III-SF Packing
Our 1200C 3 Zone Furnace with Sliding Flange, Gas Mixer & Vacuum Pump OTF-1200X-5-III-SF is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
