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Furnace Structure
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- Double-Layer Steel Casing with Air Cooling
- High-Purity Alumina Fiber Insulation
- Splittable Cover Design
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Power
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5KW, 208-240VAC, Single Phase, 50/60Hz
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Working Temp.
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- Max. Temp: 1200℃ (1 hr); 1100℃ (continuous)
- Heating Rate: ≤20℃/min
- Temp. accuracy: ±1.0℃
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Heating Zone Length
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- Three zones: (880mm, 35" in total)
Zone 1: 220mm (8.6")
Zone 2: 440mm (17.3")
Zone 3: 220 mm (8.6")
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Constant Temperature Zone
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- If three zones are set at the same temperature, the constant temperature zone is 25" (625 mm) long with a temperature discrepancy of ± 1°C
- If using only one zone (center zone), the constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of ± 1°C
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Heating Elements
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Fe-Cr-Al Alloy doped by Mo
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Temp. Controller
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- Three precision temperature controllers to control three zones separately
- PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time
- Built-in overheating & broken thermocouple protection
- Over-temperature protection and alarm allows for operation without attendant(s)
- ± 1℃ temperature accuracy
- RS485 Communications Port
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Vacuum Sensor & Display
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- Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gasses
- Gauge is installed on the vacuum flange of the tube furnace and provides a wide measure range (10^-5 ~ 1000 torr)
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Quartz Tube & Sealing Flanges
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- 80 mm O.D x 72 mm ID. x 1400 mm fused quartz tube included.
- Vacuum flanges with valves and pressure gauges are included.
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Sliding Flange with Sample Holder
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Slide for transferring sample (manually operated) is available as an option at $1900 extra cost
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Vacuum Sealing Flanges
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- Two stainless steel flanges with both vacuum gauge and valves included.
- Min. vacuum pressure achieved by the mechanical pump is 5.5 m-torr. (5.5x10^-3 torr). The pressure can reach 10^-5 torr by using a mechanical + molecular pump.
- The leaking rate is < 5 m-torr / min. and stable vacuum pressure after 24 hours is < 2 torr.
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Oxygen Monitoring
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An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation.
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Vacuum Pump
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120 L/m Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10^-2torr. Stainless steel hose tube is included for connecting to the tube furnace.
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Gas Flow Meter & Pressure Meter
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- Three gas flow meters (4% accuracy FS) are installed inside the mobile case to enable monitoring of gas flowing rates (three different kinds of gases in total).
Compact direct read flow meter, 10-100 cc/min.
Compact direct read flow meter, 16-160 cc/min.
Compact direct read flow meter, 25-250 cc/min.
- Four pressure meters are installed inside the mobile cart which is able to monitor three types of flowing gas pressure as well as the pressure of the mixing tank.
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Shipping Weight
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850 Lbs
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Valves
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Four stainless steel valves are installed in the side panel of the mobile cart to control the mixing of three inlet gases separately
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Dimensions
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- Furnace: 1100 X 450 x 670 mm
- Bottom Mobile case: 600 x 600 x 597 mm
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Warranty
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One-year limited manufacturer's warranty.
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Warning & Notes
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- To obtain an accurate temperature inside the tube furnace, you need to calibrate the temperature by yourselves.
- Tube furnaces with alumina tubes are designed for use under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
- The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
- Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
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Certificate
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- CE Certified
- NRTL or CSA certification is available at extra cost.
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