1200C Three Zones Tube Furnace with Vacuum Pump for CVD OTF-1200X-4-III-9HV Description
1200C Three Zones Tube Furnace with Vacuum Pump for CVD OTF-1200X-4-III-9HV is a CE-certified split three-zone tube furnace with a 4" diameter, designed for advanced thermal processing. It features a vacuum pump system capable of achieving up to 10^-4 torr and a precision digital mass flow meter gas control system with a 9-channel PLC touch panel. This system can control up to nine types of gases, making it ideal for Chemical Vapor Deposition (CVD) and diffusion processes.
1200C Three Zones Tube Furnace with Vacuum Pump for CVD OTF-1200X-4-III-9HV Specifications
OTF-1200X Series Tube Furnace
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Furnace Structure
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- Double-layer steel casing with air cooling.
- High purity alumina fiberboard liner for energy cost-effective operation.
- Three heating zones with three independent temperature controllers.
- Vacuum and gas mixing system are located in the bottom Mobile cart with 4 wheels.
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|
Heating Elements
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Fe-Cr-Al Alloy doped by Mo
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|
Power
|
7KW, 208-240VAC, Single Phase, 50/60Hz
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Working Temp.
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- Max. Temp: 1200℃ (1 hr); 1100℃ (continuous)
- Heating Rate: ≤20℃/min
- Temp. accuracy: ±1.0℃
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|
Heating Zone Length
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Three zones: (880mm, 35" in total)
Zone 1: 220 mm + Zone 2: 440 mm + Zone 3: 220 mm
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Constant Temp. Zone
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20" (500 mm) length
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Temp. Controller
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- Three programmable precision digital temperature controllers with 30 segments, which control each heating zone separately.
- PID adjustable with auto tune function to ensure temperature stability within +/ - 1 ℃
- Full protection in each controller for over-temperature and broken thermal couple.
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|
Tube Size & Materials
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Fused Quartz Tube
100 mm O.D x 92 mm ID. x 1400 mm
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|
Thermocouple
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Three K-type thermocouples
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High Vacuum Station
|
Vacuum Fittings
|
The Standard vacuum accessories include:
- Two stainless steel vacuum flanges with KF-25 pump connector, two needle valve and one 1/4" Swagelok tube connector.
- Six pieces of high-temperature silicone O-ring for using under 300°C.
- Two pairs of alumina thermo-blocks are included for protecting flange from heat radiation.
- One KF-40 vacuum bellows
- Three KF-40 quick clamps.
- Two KF-25 quick clamps.
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|
Structure
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- Mobile cart size: 600 (L) x 600 (W) x 700(H), mm
- Max. Loading: 600 Lbs on top
- Molecular pump control Panel: LCD digital
- Inside: Vacuum pump
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|
Vacuum sensor
|
The vacuum sensor has a KF-25 connector.
High vacuum gauge (measuring range 10^-8 mbar ~ 10^3 mbar)
|
|
Rated Voltage
|
AC 208-240V, Single phase, 50/60Hz
|
|
Control Panel
|
One button operation - the diaphragm pump and the turbomolecular pump will start after pressing the "start" button.
System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.
Self-protection - the system will protect the pump from damage by overheating and overcurrent if the leaking rate of the reaction chamber is too high to achieve the high vacuum.
LCD screen - double lines parameters checking interface make the working easier to be handled.
|
|
Volume Flow Rate
|
Nitrogen N2 33 L/s
Helium He 39 L/s (2340L/minute)
Hydrogen H2 32 L/s
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Working Range
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From 1000 mbar to <1E-7 mbar
|
|
Ultimate Pressure
|
10^-5 torr (with tube furnace)
|
|
Power Input
|
110V AC or 220V AC switchable, 50/60Hz
|
|
Power consumption
|
Duration/Max power: 100/110 Watt
|
Mass Flow Controller
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Mass Flow Controller
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9 precision mass flow meters controllers are installed in the bottom mobile cart with the digital display panel of +/-1.5% of Full Scale.
- Controller 1: 0~100 SCCM
- Controller 2: 1~199 SCCM
- Controller 3: 1~199 SCCM
- Controller 4: 1~499 SCCM
- Controller 5-9: measuring range can be customized upon request
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Other Parts
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Gas Pipe Connect
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One 1/4“ tube connect is installed in the left flange as the gas inlet.
Each MFC Station has four 1/4" Swagelok tube connects. And four on/off valves for each gas route. The fifth one is used as the gas outlet.
The 1/4" PTFE gas pipe is included in the standard package.
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|
Shipping Info
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Dimension
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Furnace: 550 x 380 x 520mm
MFC Station: 600 x 600 x 700mm
HV Station: 600 x 600 x 700mm
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|
Weight
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Net weight: 100Kg
Shipping weight: 350 lb (two pallets)
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Warranty
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One year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
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|
Compliance
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CE/UL/CSA Certificate
Please select the certificate in options bar:
CE Certificate & UL/CSA ready to pass UL/CSA certificate at extra cost
UL certificate - UL approvals (UL 61010)
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|
Warning
|
The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.12 MPa (absolute pressure)
Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
|
1200C Three Zones Tube Furnace with Vacuum Pump for CVD OTF-1200X-4-III-9HV Applications
- Chemical Vapor Deposition (CVD):
- Depositing thin films and coatings on substrates.
- Used in the production of semiconductor devices and photovoltaic cells.
- Facilitates the movement of atoms or molecules within solids.
- Essential for developing and processing semiconductor materials.
- Thermal Treatments Under Vacuum:
- Enables annealing, sintering, and other heat treatments in a controlled vacuum environment.
- Reduces contamination and oxidation, enhancing material properties.
- Shielding Gas Protection:
- Allows experiments requiring inert or reducing atmospheres.
- Protects samples from oxidation and other atmospheric interactions during processing.
1200C Three Zones Tube Furnace with Vacuum Pump for CVD OTF-1200X-4-III-9HV Packing
Our 1200C Three Zones Tube Furnace with Vacuum Pump for CVD OTF-1200X-4-III-9HV is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
Specification
OTF-1200X Series Tube Furnace
|
Furnace Structure
|
- Double-layer steel casing with air cooling.
- High purity alumina fiberboard liner for energy cost-effective operation.
- Three heating zones with three independent temperature controllers.
- Vacuum and gas mixing system are located in the bottom Mobile cart with 4 wheels.
|
|
Heating Elements
|
Fe-Cr-Al Alloy doped by Mo
|
|
Power
|
7KW, 208-240VAC, Single Phase, 50/60Hz
|
|
Working Temp.
|
- Max. Temp: 1200℃ (1 hr); 1100℃ (continuous)
- Heating Rate: ≤20℃/min
- Temp. accuracy: ±1.0℃
|
|
Heating Zone Length
|
Three zones: (880mm, 35" in total)
Zone 1: 220 mm + Zone 2: 440 mm + Zone 3: 220 mm
|
|
Constant Temp. Zone
|
20" (500 mm) length
|
|
Temp. Controller
|
- Three programmable precision digital temperature controllers with 30 segments, which control each heating zone separately.
- PID adjustable with auto tune function to ensure temperature stability within +/ - 1 ℃
- Full protection in each controller for over-temperature and broken thermal couple.
|
|
Tube Size & Materials
|
Fused Quartz Tube
100 mm O.D x 92 mm ID. x 1400 mm
|
|
Thermocouple
|
Three K-type thermocouples
|
High Vacuum Station
|
Vacuum Fittings
|
The Standard vacuum accessories include:
- Two stainless steel vacuum flanges with KF-25 pump connector, two needle valve and one 1/4" Swagelok tube connector.
- Six pieces of high-temperature silicone O-ring for using under 300°C.
- Two pairs of alumina thermo-blocks are included for protecting flange from heat radiation.
- One KF-40 vacuum bellows
- Three KF-40 quick clamps.
- Two KF-25 quick clamps.
|
|
Structure
|
- Mobile cart size: 600 (L) x 600 (W) x 700(H), mm
- Max. Loading: 600 Lbs on top
- Molecular pump control Panel: LCD digital
- Inside: Vacuum pump
|
|
Vacuum sensor
|
The vacuum sensor has a KF-25 connector.
High vacuum gauge (measuring range 10^-8 mbar ~ 10^3 mbar)
|
|
Rated Voltage
|
AC 208-240V, Single phase, 50/60Hz
|
|
Control Panel
|
One button operation - the diaphragm pump and the turbomolecular pump will start after pressing the "start" button.
System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.
Self-protection - the system will protect the pump from damage by overheating and overcurrent if the leaking rate of the reaction chamber is too high to achieve the high vacuum.
LCD screen - double lines parameters checking interface make the working easier to be handled.
|
|
Volume Flow Rate
|
Nitrogen N2 33 L/s
Helium He 39 L/s (2340L/minute)
Hydrogen H2 32 L/s
|
|
Working Range
|
From 1000 mbar to <1E-7 mbar
|
|
Ultimate Pressure
|
10^-5 torr (with tube furnace)
|
|
Power Input
|
110V AC or 220V AC switchable, 50/60Hz
|
|
Power consumption
|
Duration/Max power: 100/110 Watt
|
Mass Flow Controller
|
Mass Flow Controller
|
9 precision mass flow meters controllers are installed in the bottom mobile cart with the digital display panel of +/-1.5% of Full Scale.
- Controller 1: 0~100 SCCM
- Controller 2: 1~199 SCCM
- Controller 3: 1~199 SCCM
- Controller 4: 1~499 SCCM
- Controller 5-9: measuring range can be customized upon request
|
Other Parts
|
Gas Pipe Connect
|
One 1/4“ tube connect is installed in the left flange as the gas inlet.
Each MFC Station has four 1/4" Swagelok tube connects. And four on/off valves for each gas route. The fifth one is used as the gas outlet.
The 1/4" PTFE gas pipe is included in the standard package.
|
|
Shipping Info
|
Dimension
|
Furnace: 550 x 380 x 520mm
MFC Station: 600 x 600 x 700mm
HV Station: 600 x 600 x 700mm
|
|
Weight
|
Net weight: 100Kg
Shipping weight: 350 lb (two pallets)
|
|
Warranty
|
One year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
|
|
Compliance
|
CE/UL/CSA Certificate
Please select the certificate in options bar:
CE Certificate & UL/CSA ready to pass UL/CSA certificate at extra cost
UL certificate - UL approvals (UL 61010)
|
|
Warning
|
The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.12 MPa (absolute pressure)
Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
|
