1200C Mini CVD Tube Furnace OTF-1200X-S50-2F Description
1200C Mini CVD Tube Furnace OTF-1200X-S50-2F is a CE-certified split tube furnace designed for heating samples up to 1200°C. It features a KF25 gas outlet and a digital vacuum gauge installed in the right flange, enabling connection with a 226 L/min mechanical pump (including a pump filter). The left flange connects to a 2-channel gas mixing station via a 1/4" gas pipe. The precision temperature controller offers 30 segments of heating and cooling steps with an accuracy of ±1°C.
This furnace system also includes an anti-corrosive Pirani capacitance diaphragm gauge for accurate vacuum measurements with aggressive gases. Additionally, the digital vacuum gauge provides precise pressure readings for any mixed gases, ensuring optimal control and measurement during your experiments.
1200C Mini CVD Tube Furnace OTF-1200X-S50-2F Specifications
OTF-1200X Series Tube Furnace
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Furnace Structure
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- Heavy-duty steel casing
- Energy-efficient Al2O3 fibrous thermal insulation
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Heating Elements
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Fe-Cr-Al Alloy doped by Mo
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Power
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1.75KW, 208-240VAC, Single Phase, 50/60Hz
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Working Temp.
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- Max. Temp: 1200℃ (1 hr); 1100℃ (continuous)
- Heating Rate: ≤20℃/min
- Temp. accuracy: ±1.0℃
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Heating Zone
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Total heating zone length: 8" (200mm); Constant temp. zone: 2.3" (60mm) (+/-1°C) @ 900 °C.
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Processing Tube
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Quartz tube: 50mm OD x 44mm ID x 600mm L
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Temp. Controller
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- PID automatic control and auto-tune function.
- 30 programmable segments for control of heating and rate cooling rate and dwell time.
- Overheating & broken thermocouple protection.
- Over-temperature protection and alarm allow for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
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Other Parts
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Vacuum Gauge
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- Corrosion-proof Capacitance Diaphragm Gauge is installed on the vacuum flange (left side) of the tube furnace and provides a wide measure range (10-5 ~ 1000 torr).
- Accurate pressure reading with any mixed gases
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Two Channel Gas Mixing Station
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- Two floating flow meters 16 to 100 mL/min flow rate range
- Three mechanical pressure gauges (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit)
- Vacuum needle valves are made of SS304
- Three Pipe fittings for 1/4" pipe (nylon or stainless steel) on the back panel
- Compact size: 340Lx300Dx 180H mm (13.4"x12"x7")
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Vacuum Flanges and Fittings
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- Vacuum fittings in standard package:
one Digital vacuum gauge w/ 0.00001 ~ 1000 torr measurement range
one 1/4" Swagelok tube connector
two KF-25 quick clamps
one 600mm length SS vacuum bellows
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Vacuum Pump
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- Double Stage Rotary Vane Vacuum Pump EQ-FYP-Pump (156L/m) with oil trap, Exhaust Filter, Bellow& KF-D25 Inlet, and KF25 Clamp are included.
- Vacuum Pressure can reach 1E-2 Torr (50 m-Torr)
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Net Weight
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100 lbs
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Product Dimensions
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- Furnace: 340 x 300 x 400 mm
- Vacuum Pump: 440 x 160 x 300 mm
- Gas Station: 340 x 300 x 180 mm
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Shipping Weight
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200 lbs
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Shipping Size
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45x45x35"
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Warranty
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One-year limited manufacturer's warranty
(Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
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Compliance
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CE certified
NTRL and CSA certification is available upon request at the extra cost
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Application Notes
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Warning: Tube furnaces with quartz tube are designed for use with a vacuum and low pressure < 0.2 bar / 3 psi
Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
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1200C Mini CVD Tube Furnace OTF-1200X-S50-2F Applications
- Chemical Vapor Deposition (CVD):
- Depositing thin films and coatings on substrates.
- Used in the production of semiconductor devices and photovoltaic cells.
- Facilitates the movement of atoms or molecules within solids.
- Essential for developing and processing semiconductor materials.
- Thermal Treatments Under Vacuum:
- Enables annealing, sintering, and other heat treatments in a controlled vacuum environment.
- Reduces contamination and oxidation, enhancing material properties.
- Shielding Gas Protection:
- Allows experiments requiring inert or reducing atmospheres.
- Protects samples from oxidation and other atmospheric interactions during processing.
1200C Mini CVD Tube Furnace OTF-1200X-S50-2F Packing
Our 1200C Mini CVD Tube Furnace OTF-1200X-S50-2F is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
Specification
OTF-1200X Series Tube Furnace
|
Furnace Structure
|
- Heavy-duty steel casing
- Energy-efficient Al2O3 fibrous thermal insulation
|
|
Heating Elements
|
Fe-Cr-Al Alloy doped by Mo
|
|
Power
|
1.75KW, 208-240VAC, Single Phase, 50/60Hz
|
|
Working Temp.
|
- Max. Temp: 1200℃ (1 hr); 1100℃ (continuous)
- Heating Rate: ≤20℃/min
- Temp. accuracy: ±1.0℃
|
|
Heating Zone
|
Total heating zone length: 8" (200mm); Constant temp. zone: 2.3" (60mm) (+/-1°C) @ 900 °C.
|
|
Processing Tube
|
Quartz tube: 50mm OD x 44mm ID x 600mm L
|
|
Temp. Controller
|
- PID automatic control and auto-tune function.
- 30 programmable segments for control of heating and rate cooling rate and dwell time.
- Overheating & broken thermocouple protection.
- Over-temperature protection and alarm allow for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
|
Other Parts
|
Vacuum Gauge
|
- Corrosion-proof Capacitance Diaphragm Gauge is installed on the vacuum flange (left side) of the tube furnace and provides a wide measure range (10-5 ~ 1000 torr).
- Accurate pressure reading with any mixed gases
|
|
Two Channel Gas Mixing Station
|
- Two floating flow meters 16 to 100 mL/min flow rate range
- Three mechanical pressure gauges (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit)
- Vacuum needle valves are made of SS304
- Three Pipe fittings for 1/4" pipe (nylon or stainless steel) on the back panel
- Compact size: 340Lx300Dx 180H mm (13.4"x12"x7")
|
|
Vacuum Flanges and Fittings
|
- Vacuum fittings in standard package:
one Digital vacuum gauge w/ 0.00001 ~ 1000 torr measurement range
one 1/4" Swagelok tube connector
two KF-25 quick clamps
one 600mm length SS vacuum bellows
|
|
Vacuum Pump
|
- Double Stage Rotary Vane Vacuum Pump EQ-FYP-Pump (156L/m) with oil trap, Exhaust Filter, Bellow& KF-D25 Inlet, and KF25 Clamp are included.
- Vacuum Pressure can reach 1E-2 Torr (50 m-Torr)
|
|
Net Weight
|
100 lbs
|
|
Product Dimensions
|
- Furnace: 340 x 300 x 400 mm
- Vacuum Pump: 440 x 160 x 300 mm
- Gas Station: 340 x 300 x 180 mm
|
|
Shipping Weight
|
200 lbs
|
|
Shipping Size
|
45x45x35"
|
|
Warranty
|
One-year limited manufacturer's warranty
(Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
|
|
Compliance
|
CE certified
NTRL and CSA certification is available upon request at the extra cost
|
|
Application Notes
|
Warning: Tube furnaces with quartz tube are designed for use with a vacuum and low pressure < 0.2 bar / 3 psi
Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
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