1200C Dual Sliding Tube Furnace for CVD OTF-1200X-S2-50SL-CVD Description
1200C Dual Sliding Tube Furnace for CVD OTF-1200X-S2-50SL-CVD is a dual slidable furnace on a rail, designed specifically for thermal Chemical Vapor Deposition (CVD). It features a 2" OD x 55"L quartz tube with flanges and can achieve a maximum working temperature of 1200°C. This unique design allows two 2" tube furnaces to slide along the rail, facilitating optimal positioning for thermal evaporation/sublimation of source materials and film deposition.
Sliding the furnace from one side to another enables rapid heating and cooling rates of up to 100°C/min. Optional features include motorized sliding for enhanced automation, Mass Flow Controller (MFC) gas delivery systems, and an RF Plasma generator. These options enable the construction of a flexible Thermal CVD (TCVD) system at a low cost, suitable for a wide range of research and industrial applications.
1200C Dual Sliding Tube Furnace for CVD OTF-1200X-S2-50SL-CVD Specifications
OTF-1200X Series Tube Furnace
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Furnace Structure
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- Double-Layer Steel Structures: Both furnaces are constructed with double-layer steel, capable of withstanding temperatures up to 1200°C.
- Heating and Constant Temperature Zones: Each furnace features a 200mm heating zone and a 60mm long constant temperature zone, ensuring precise thermal control.
- Sliding Rail System: Equipped with a pair of sliding rails at the bottom, allowing manual adjustment from side to side with a maximum sliding distance of 400mm, facilitating flexible positioning and operation.
- Ready-to-Use Vacuum Flanges: Vacuum flanges are pre-installed for immediate setup and usage, ensuring quick integration into vacuum systems for various applications.
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Heating Elements
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Fe-Cr-Al Alloy doped by Mo
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Power
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2.5KW, 208-240VAC, Single Phase, 50/60Hz
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Working Temp.
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- Max. Temp: 1200℃ (1 hr); 1100℃ (continuous)
- Heating Rate: ≤20℃/min
- Temp. accuracy: ±1.0℃
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Heating Zone Length
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200 mm (~8") for each furnace
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Constant Temperature Zone
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60 mm
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Processing Tube Size
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High purity fused quartz tube
Size: 50mm O.D x 44mm I.D x1500 mm Length
Optional: S310 high temp alloy tube is available for higher pressure (100 PSI) at the extra cost
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Temp. Controller
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- Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
- Built-in over-temperature alarm and protection allow for operation without an attendant.
- Two K-type thermal couples are included.
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Vacuum Flanges
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- Stainless steel vacuum flanges with a vacuum gauge are installed on both ends of the tube with heavy-duty support.
- Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost, and water cold flange
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Sliding Rails / Table
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- Double sliding rail made by Cr-plated steel
- Sliding length: 1200 mm
- Two slide-stopping clamps are included for holding the position of the furnaces.
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Dimensions
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- Furnace: 340 x 300 x 400 mm
- Total: 1600 x 430 x 500 mm (furnaces + sliding)
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Net Weight
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~ 80 kg
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Shipping Package Size
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70" x 45" x 45" (inch)
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Warranty
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One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
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Compliance
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CE Certified
NRTL or CSA certification is available upon request at the extra cost
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Notes
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- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
- Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.
- The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
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1200C Dual Sliding Tube Furnace for CVD OTF-1200X-S2-50SL-CVD Applications
Facilitates the deposition of thin films and coatings on substrates through thermal processes.
Used in the production of semiconductors, photovoltaic cells, and advanced materials.
Enables the synthesis of nanomaterials, such as nanotubes and graphene, through controlled thermal processes.
Supports the development of advanced ceramics and composite materials.
- Source Material Evaporation/Sublimation:
Positions two tube furnaces on a sliding rail to optimize thermal evaporation or sublimation processes for source materials.
Facilitates precise positioning for uniform film deposition and material processing.
- High Heating and Cooling Rates:
Achieves rapid heating and cooling rates up to 100°C/min, crucial for optimizing processing times and material properties.
- Flexible System Configuration:
Offers optional features like motorized sliding, Mass Flow Controller (MFC) gas delivery systems, and RF Plasma generator integration.
Enables easy customization and adaptation to specific research or industrial needs.
1200C Dual Sliding Tube Furnace for CVD OTF-1200X-S2-50SL-CVD Packing
Our 1200C Dual Sliding Tube Furnace for CVD OTF-1200X-S2-50SL-CVD is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
Specification
OTF-1200X Series Tube Furnace
|
Furnace Structure
|
- Double-Layer Steel Structures: Both furnaces are constructed with double-layer steel, capable of withstanding temperatures up to 1200°C.
- Heating and Constant Temperature Zones: Each furnace features a 200mm heating zone and a 60mm long constant temperature zone, ensuring precise thermal control.
- Sliding Rail System: Equipped with a pair of sliding rails at the bottom, allowing manual adjustment from side to side with a maximum sliding distance of 400mm, facilitating flexible positioning and operation.
- Ready-to-Use Vacuum Flanges: Vacuum flanges are pre-installed for immediate setup and usage, ensuring quick integration into vacuum systems for various applications.
|
|
Heating Elements
|
Fe-Cr-Al Alloy doped by Mo
|
|
Power
|
2.5KW, 208-240VAC, Single Phase, 50/60Hz
|
|
Working Temp.
|
- Max. Temp: 1200℃ (1 hr); 1100℃ (continuous)
- Heating Rate: ≤20℃/min
- Temp. accuracy: ±1.0℃
|
|
Heating Zone Length
|
200 mm (~8") for each furnace
|
|
Constant Temperature Zone
|
60 mm
|
|
Processing Tube Size
|
High purity fused quartz tube
Size: 50mm O.D x 44mm I.D x1500 mm Length
Optional: S310 high temp alloy tube is available for higher pressure (100 PSI) at the extra cost
|
|
Temp. Controller
|
- Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
- Built-in over-temperature alarm and protection allow for operation without an attendant.
- Two K-type thermal couples are included.
|
|
Vacuum Flanges
|
- Stainless steel vacuum flanges with a vacuum gauge are installed on both ends of the tube with heavy-duty support.
- Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost, and water cold flange
|
|
Sliding Rails / Table
|
- Double sliding rail made by Cr-plated steel
- Sliding length: 1200 mm
- Two slide-stopping clamps are included for holding the position of the furnaces.
|
|
Dimensions
|
- Furnace: 340 x 300 x 400 mm
- Total: 1600 x 430 x 500 mm (furnaces + sliding)
|
|
Net Weight
|
~ 80 kg
|
|
Shipping Package Size
|
70" x 45" x 45" (inch)
|
|
Warranty
|
One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
|
|
Compliance
|
CE Certified
NRTL or CSA certification is available upon request at the extra cost
|
|
Notes
|
- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
- Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.
- The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
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