1700C Three Zone Alumina Tube Furnace GSL-1700X-III-F3LV Description
1700C Three Zone Alumina Tube Furnace GSL-1700X-III-F3LV is a three-zone tube furnace with a 60mm diameter alumina tube, a mechanical vacuum pump, and a three-channel gas flow system. It can heat samples to temperatures up to 1700°C and achieve a vacuum level of up to 5x10^-2 torr. The furnace system allows for precise mixing of 1-3 types of gases, essential for Chemical Vapor Deposition (CVD) or diffusion processes. Additionally, the system features an anti-corrosive Pirani Capacitance Diaphragm Gauge for accurate vacuum measurements, even with aggressive gases.
1700C Three Zone Alumina Tube Furnace GSL-1700X-III-F3LV Specifications
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Furnace Structure
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- Double-Layer Steel Casing with Air Cooling: Two internal cooling fans maintain the external case temperature below 55°C, enhancing reliability.
- High-Purity Fibrous Alumina Insulation: Maximizes energy efficiency by minimizing heat loss during operation.
- Three Independent Heating Zones: Controlled by three precision temperature controllers, allowing precise and uniform heating across different zones.
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Power
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10 KW, AC 208-240V Single Phase, 50/60 Hz
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Heating Zone
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Three zones: total 25" (630 mm) heating zone (including two refractory separators)
- Zone 1: 7.5" (190 mm) heated by 4 pcs U type SiC
Working temperature 800 - 1400°C
Heating rate: 10°C/min
- Zone 2: 10" (250 mm) heated by 6 pcs U type MoSi2
Working temperature 800 - 1700°C
Max. Heating rate: 5°C/min
- Zone 3: 7.5" (190 mm) heated by 4 pcs U type SiC
Working temperature 800 - 1400°C
Max. Heating rate: 10°C/min
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Tube Size and Flange
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- 99.8% purity Alumina Tube
- 2-3/8" (60mm) O.D.x 2-1/8"I.D. (54mm) x 48" (1200mm) Length
- 60 mm stainless steel vacuum sealing flange with valve and meter is included
- Two porous ceramic blocks are included for protecting flange from heating radiation
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Temp. Control
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- Three precision temperature controllers to control three zones separately.
- PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
- 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Built-in overheating & broken thermocouple protection.
- Over temperature protection and alarm allows for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- RS485 Communications Port.
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Vacuum Gauge
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- Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
- Gauge is installed on the vacuum flange (right side) of the tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
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Dimensions
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550 x 380 x 520 mm
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Vacuum Pump
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Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed inside the vacuum station. The vacuum system can reach 5x10-2 torr within 30 minutes of pumping.
One KFD25 adaptor is installed to the flange for connecting to the vacuum pump.
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Three Channel Gas Mixing and Delivery System
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- Three gas flow meters (4% accuracy FS) are installed inside the mobile case which is able to monitor gases flowing rate (three different kinds of gases in total)
1) Compact direct read flow meter, 10-100 cc/min.
2) Compact direct read flow meter, 16-160 cc/min.
3) Compact direct read flow meter, 25-250 cc/min.
- One pressure meter is installed inside a mobile cart which are able to monitor the pressure of the mixing tank.
- 4 stainless steel needle valves are installed on the mobile cart
- Two gas-flowing pipes are provided for immediate use (one pipe from two mixed gases and another is independent gas)
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Power Cable & Plug
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- 10 feet length 8-3 AWG heavy duty UL approved power cable is included
- The plug is not included, you can order from your local hardware store according to the female plug in your lab
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Dimensions
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Furnace: 863 L x 457 W x 711 H mm (34 L x 18 W x 28 H inch)
Gas cart: 850 mm (L) x 600 mm (W) x 700 mm (H)
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Net Weight
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150Kg (furnace) + 100Kg (total 550lb)
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Shipping Weight
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800 lbs
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Shipping Dimensions
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Two cases in one pallet: 45x45x35/case
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Warranty
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One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
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Compliance
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CE Certified
UL / MET / CSA Certification is available upon request, additional charges will apply
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Warnings
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- The tube furnaces with alumina tubes are designed for use under vacuum and low pressure < / 0.2 Bar/ 3 PSI
- Never use a graphite crucible in an alumina tube.
- Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.
- The flow rate for gases should be limited to < 200 SCCM (or 200ml/min)
- Vacuum limit definition for all alumina tube furnaces: * Vacuum pressures may only be safely used up to 1500°C
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1700C Three Zone Alumina Tube Furnace GSL-1700X-III-F3LV Applications
- Chemical Vapor Deposition (CVD):
Enables deposition of thin films and coatings on substrates with controlled gas atmospheres.
Used in semiconductor fabrication, surface coating, and nanomaterial synthesis.
Facilitates controlled movement of atoms or molecules within solid materials.
Essential for doping semiconductor materials and enhancing material properties.
- High-Temperature Annealing and Sintering:
Ideal for annealing processes to improve material crystallinity and eliminate defects.
Supports sintering of ceramics and metals for densification and enhanced mechanical properties.
- Research and Development:
Provides a controlled environment for studying material behavior and properties at high temperatures.
Essential for exploring new materials and processes in research laboratories.
1700C Three Zone Alumina Tube Furnace GSL-1700X-III-F3LV Packing
Our 1700C Three Zone Alumina Tube Furnace GSL-1700X-III-F3LV is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
