Silicon Nitride Substrate Description:
Silicon Nitride Substrate is a type of ceramic material used in various applications, particularly in the semiconductor and electronics industries. Silicon nitride is valued for its excellent combination of mechanical, thermal, and electrical properties. It is characterized by high strength, exceptional thermal stability, good electrical insulation, resistance to thermal shock, and chemical inertness, especially in harsh environments. It is the best material for high-power semiconductor device substrates and is widely used in power integrated circuits.
Silicon Nitride Substrate Specifications:
|
Size
|
customized
|
|
Thickness (mm)
|
0.25/0.32/0.38/0.5, etc.
|
|
Surface Roughness Ra
|
<0.6μm
|
|
Density
|
≥3.2 g/cm3
|
|
Bending Strength
|
>700 MPa, 600 MPa
|
|
Vickers hardness
|
15.0 GPa
|
|
Young's modulus
|
310.0 GPa
|
|
Thermal Expansion Coefficient
|
2.5-3.1 X10-6/K
|
|
Specific Heat
|
680
|
Silicon Nitride Substrate Applications
- Semiconductor Manufacturing: Used as a substrate or wafer for fabricating electronic devices, Si3N4 provides a stable, chemically inert platform for the deposition and patterning of various electronic materials.
- LEDs and Power Electronics: The thermal and electrical properties of silicon nitride make it suitable for use in light-emitting diodes (LEDs) and power electronic devices, where it can help improve performance and reliability.
- MEMS (Microelectromechanical Systems): Si3N4 is used in the fabrication of MEMS devices due to its mechanical strength and compatibility with semiconductor processing techniques.
- Wear Components: In industrial applications, silicon nitride is used for making bearings, seals, and other components that benefit from its hardness, wear resistance, and chemical stability.
- Cutting Tools: The material's hardness and thermal shock resistance make it suitable for use in high-speed cutting tools.
- Medical Devices: Its biocompatibility makes silicon nitride suitable for various medical applications, including surgical instruments and implants.
Silicon Nitride Substrate Packaging
Our Silicon Nitride Substrate is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
Silicon Nitride Substrate FAQs
Q1: What is Silicon Nitride Substrate?
A silicon nitride substrate is a thin, high-performance material primarily composed of silicon nitride (Si₃N₄), which is a ceramic compound. It is used in electronic and microelectronic applications, including as a substrate for integrated circuits (ICs) and power devices. Silicon nitride is valued for its high thermal stability, excellent mechanical strength, and electrical insulating properties.
Q2: What are the key properties of Silicon Nitride?
High Thermal Stability: Silicon nitride can withstand high temperatures (up to 1400°C or higher) without significant degradation.
Electrical Insulation: It is an excellent electrical insulator, making it ideal for use in electronic and semiconductor devices.
Mechanical Strength: The material is tough and resistant to wear and corrosion.
Thermal Conductivity: It has good thermal conductivity, making it suitable for heat dissipation in high-performance electronic devices.
Q3: What is the typical thickness of Silicon Nitride Substrates?
The thickness of silicon nitride substrates can vary depending on the application. Common thicknesses range from a few micrometers (for thin film applications) to hundreds of micrometers (for thicker substrates used in power electronics or MEMS). Thin films are often used in IC fabrication, while thicker substrates are used in power devices or high-thermal applications.
