Tantalum Oxide Sputtering Target Description
Tantalum Oxide Sputtering Target is a high-purity material widely used for thin-film deposition in optical coatings, semiconductors, and protective layers. Known for its excellent dielectric properties, high refractive index, and superior corrosion resistance, tantalum oxide is a preferred choice in advanced coating applications.
- High Purity & Stability – Ensures uniform film deposition with minimal impurities.
- Excellent Dielectric Properties – Ideal for capacitor and insulating layers in semiconductor applications.
- High Refractive Index – Commonly used in optical coatings for anti-reflective and high-precision applications.
- Strong Corrosion & Wear Resistance – Enhances durability in harsh environments.
Tantalum Oxide Sputtering Target Specification
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Compound Formula
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Ta2O5
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Molecular Weight
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441.89
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Appearance
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White solid
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Melting Point
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1,872℃
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Density
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8.2 g/cm3
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Available Sizes
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Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″, Customized
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Tantalum Oxide Sputtering Target Applications
- Semiconductors – Used in thin-film capacitors, gate dielectrics, and high-k dielectric materials.
- Optical Coatings – Ideal for anti-reflective coatings, laser optics, and precision optical filters.
- Protective Coatings – Enhances wear and oxidation resistance in electronic and industrial applications.
Tantalum Oxide Sputtering Target Packing
Our Tantalum Oxide Sputtering Target is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
FAQs
Q1: What is a Tantalum Oxide Sputtering Target?
A Tantalum Oxide (Ta₂O₅) Sputtering Target is a high-purity material used in thin-film deposition processes such as physical vapor deposition (PVD) and magnetron sputtering. It is commonly applied in semiconductors, optical coatings, and protective layers due to its excellent dielectric properties and high refractive index.
Q2: What are the key properties of Tantalum Oxide?
- High dielectric constant – Suitable for capacitor and insulating layers.
- High refractive index – Ideal for optical coatings in lenses and filters.
- Excellent corrosion resistance – Enhances durability in harsh environments.
- Good thermal and chemical stability – Ensures consistent performance in high-temperature applications.
Q3: What are the main applications of Tantalum Oxide Sputtering Targets?
- Semiconductor industry – Used in thin-film capacitors, gate dielectrics, and memory storage devices.
- Optical coatings – Applied in anti-reflective coatings, laser optics, and high-precision optical filters.
- Protective coatings – Enhances wear and oxidation resistance in electronic and industrial applications.
Q4: Does the Tantalum Oxide Sputtering Target include a backing plate?
Tantalum Oxide (Ta₂O₅) sputtering targets do not automatically come with a backing plate, but we highly recommend using one, especially for fragile or ceramic targets.
