Silicon Carbide Coated Graphite Trays Description
Silicon Carbide Coated Graphite Trays are created by coating the surface of highly purified isotropic graphite with a fine layer of silicon carbide by the Chemical Vapor Deposition (CVD) process. SiC Coated Graphite Trays are widely used in semiconductors and coating.
The CVD process delivers extremely high purity and theoretical density of SiC coating with no porosity. What’s more, as silicon carbide is very hard, it can be polished to a mirror-like surface. CVD silicon carbide (SiC) coating delivered several advantages including ultra-high purity surface and extremely wear durability. As coated products have great performance in high vacuum and high-temperature circumstances, they are ideal for applications in the semiconductor industry and other ultra-clean environments.
Stanford Advanced Materials also provides Silicon Carbide Coated Graphite Trays.
Silicon Carbide Coated Graphite Trays Specification
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Compound Formula
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SiC
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Molecular Weight
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40.1
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Appearance
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Black
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Melting Point
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2,730℃ (4,946℉) (decomposes)
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Density
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3.0 to 3.2 g/cm3
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Electrical Resistivity
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1 to 4 10x Ω-m
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Poisson's Ratio
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0.15 to 0.21
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Specific Heat
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670 to 1180 J/kg-K
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Coating thickness
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50~500um
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Silicon Carbide Coated Graphite Trays Advantages
- The silicon carbide layer is very hard and stable at high temperatures. It has excellent oxidation, corrosion and chemical resistance.
- SiC-coated graphite prevents the separation and scattering of graphite particles, as well as the emission of gases and impurities in the graphite matrix.
Silicon Carbide Coated Graphite Trays Applications
- CVD silicon carbide coating has been applied in semiconductor industries already, such as MOCVD trays, RTP, and oxide etching chambers since silicon nitride has great thermal shock resistance and can withstand high-energy plasma.
- Silicon carbide is widely used in semiconductors and coating.
Silicon Carbide Coated Graphite Trays Packaging
Our silicon carbide-coated graphite trays are carefully handled to minimize damage during storage and transportation and to preserve the quality of our products in their original condition.
