SC2276 SOI Wafer

Catalog No. SC2276
Material Si
Diameter 2'' to 12''
Dopant Boron/Phosphorous/Antimony/Arsenic
Conductivity P-type/N-type / Intrinsic

SAM provides Silicon Thermal Oxide Wafer in diameter from 2" to 12", we always choose prime grade and a defect-free silicon wafer as a substrate for growing high uniformity thermal oxide layer to meet your specific requirements.

Related Products: Indium Antimonide Wafer, Silicon Carbide Wafer, Gallium Phosphide Wafer, Silicon Wafer, 1851 Germanium Wafer (Ge wafer).

Description of SOI Wafer

Silicon on insulator (SOI) wafers are most common in microelectromechanical systems (MEMS) and advanced complementary metal-oxide-semiconductor (CMOS) integrated circuit fabrication and can improve many of the processes that more traditional silicon wafers are used in. These wafers provide a manufacturing solution that helps reduce power and heat while increasing the speed performance of a device. SOI wafers are unique products for specific end-user applications.

SOI-wafer

 

Specifications of SOI Wafer

Method

Fusion bonding

Diameter

2'' to 12''

Device thickness

2 um ~ 300 um

Tolerance

+/- 0.5 um ~ 2 um

Orientation

<100> / <111> / <110> or others

Conductivity

P-type / N-type / Intrinsic

Dopant

Boron / Phosphorous / Antimony / Arsenic

Resistivity

0.001 ~ 100000 ohm-cm

Oxide thickness

500A ~ 4 um

Tolerance

+/- 5%

Handle wafer

>= 300 um

Surface

Double sides polished

Coating

Oxide and nitride can be supplied on both sides of SOI wafer

 

Applications of SOI Wafer

The application areas include pressure sensors, silicon microphones, and fluidic components, while thicker layers are suitable for inertial sensor manufacturing. It can also be used in IC and MEMS process integration. It also enables integrated backside packaging and hermetic sealing.

LATEST RECOMMENDED

TC2234 Type K Thermocouple Wire

TC2234 Type K Thermocouple Wire

TC2235 Type N Thermocouple Wire

TC2235 Type N Thermocouple Wire

SC2275 Silicon Thermal Oxide Wafer

SC2275 Silicon Thermal Oxide Wafer

SM2934 Nickel Silicide (Ni2Si) (CAS: 12059-14-2)

SM2934 Nickel Silicide (Ni2Si) (CAS: 12059-14-2)

SM2940 Niobium Silicide (NbSi2) (CAS: 12034-80-9)

SM2940 Niobium Silicide (NbSi2) (CAS: 12034-80-9)

SM2941 Silicon(IV) Iodide (I4Si) Powder (CAS: 13465-84-4)

SM2941 Silicon(IV) Iodide (I4Si) Powder (CAS: 13465-84-4)

SM2942 Silicon Monoxide (OSi) (CAS: 10097-28-6)

SM2942 Silicon Monoxide (OSi) (CAS: 10097-28-6)

sc/1620458910-normal-Sericite Powder SiO2-Al2O3.jpg

SM3362 Sericite Powder SiO2-Al2O3

GET A QUOTE

Please fill in your details and one of our material experts will get back to you within 24 hours. For more information, contact us via E-mail at sales@samaterials.com.

** Email address with your company's domain name is preferred. Otherwise, we may not be able to process your inquiry.